Feedback Stage×シグマ光機 - List of Manufacturers, Suppliers, Companies and Products

5nm Feedback Stage FS-1020SPX/XY

Built-in encoder: A positioning stage with high resolution, positioning reproducibility, and position holding capability of 5nm resolution!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. It has a resolution of "5nm" (*1) and a stroke of "20mm." Thanks to our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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10nm Feedback Stage FS-1020PX/XY

A positioning stage with excellent position resolution, reproducibility, and retention due to feedback control with 10nm resolution.

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It performs feedback control based on the encoder's position information, offering high resolution, high positional reproducibility, and high positional stability. When used in combination with the feedback stage controller FC-511, it operates with a resolution of 10nm over a stroke of 20mm.

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10nm Feedback Stage FS-1040PX/XY

[Stroke 40mm] A positioning stage with high resolution of 10nm, excellent positioning repeatability, and high position holding capability!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it excels in resolution, positioning repeatability, and position holding capability. When combined with the feedback stage controller FC-511, it can operate with a reading resolution of '10nm' over a '40mm' stroke.

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10nm Feedback Stage FS-1050PX/XY

"Precision positioning device" with high resolution of 10nm, high positioning repeatability, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

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1nm Feedback Stage FS-1020UPX / XY

"Precision positioning device" maintains high resolution of 1nm while increasing movement speed!

It is equipped with an optical linear encoder, allowing positioning with a resolution of '1nm' against the reading value of the built-in scale. The stroke is '20mm' long, enabling both transport and precise positioning with a single unit. It is used in research fields that handle wavelengths on the nanometer order.

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1nm Feedback Stage FS-1040UPX / XY

"Precision positioning device" maintains its high resolution of 1nm while achieving faster movement speed!

This is a precision positioning stage that incorporates an optical linear encoder, enabling closed-loop control with a resolution of '1nm' for the readings from the built-in scale. It has a long stroke of '40mm', allowing for both movement and precise positioning with a single unit. When used in combination with the feedback stage controller 'FC-911', it can operate at a movement speed of 5mm/sec.

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1nm Feedback Stage FS-1050UPX / XY

"Precision positioning device" maintains its high resolution of 1nm while achieving faster movement speed!

This is a precision positioning stage that incorporates an optical linear encoder, allowing for closed-loop control with a resolution of '1nm' based on the reading values of the built-in scale. The stroke is '50mm', enabling both movement and precise positioning with a single unit. When used in combination with the feedback stage controller 'FC-911', it can operate at a movement speed of 5mm/sec.

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1nm Feedback Stage FS-1050SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, which reduces detection errors. It has a stroke of 50mm with a resolution of 1nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1050SPX (MD) and the high-speed type is FS-1050UPX. (*1) In combination with the feedback stage controller FC-911.

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5nm Feedback Stage FS-1040SPX/XY

Precision positioning device with an integrated linear encoder, operating with a resolution of 5nm.

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 40mm with a resolution of 5nm (*1). Due to the combination of our self-developed linear scale and our unique feedback control circuit, it performs full closed-loop control, ensuring high resolution, high positioning reproducibility, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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5nm Feedback Stage FS-1050SPX/XY

"Precision positioning device" with 5nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 5nm (*1). Thanks to our proprietary linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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10nm Feedback Stage FS-1100PX/XY

Built-in encoder, 10nm resolution, high positioning repeatability, and excellent position retention after positioning stage!

An optical linear encoder is built into the center of the stage to reduce position detection errors, and by feeding back position information to the controller, it achieves high resolution, high positioning repeatability, and position holding capability after positioning. The stroke is '100mm' with a resolution of '10nm' (*1). Due to the long operating range, both movement and positioning can be performed with this single stage. (*1) In combination with the feedback stage controller FC-511.

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How to Choose a Feedback Stage (Positioning)

Optical linear scale! A system for positioning with nanometer resolution.

Feedback refers to a system that monitors position information from a linear scale through closed-loop control to improve the reproducibility of positioning. The feedback stage system is composed of a linear scale, a stage, and a controller. The selection guide introduces methods for selecting stages based on three points: "operating type," "resolution," and "stroke," tailored to the customer's specifications. 【Features of the Feedback Stage Controller】 - Full closed-loop control - Built-in motor driver - Various error detection functions - Communication via RS-232C standard / GPIB For more details, please contact us or download the catalog.

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1nm Feedback Stage FS-1020SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position holding stability after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 20mm with a resolution of 1nm (*1). Thanks to our self-developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1020SPX(MD) and the high-speed type is FS-1020UPX. (*1) In combination with the feedback stage controller FC-911.

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1nm Feedback Stage FS-1040SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a resolution of "1nm" and a stroke of "40mm." Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1040SPX(MD) and the high-speed type is FS-1040UPX. (*1) In combination with the feedback stage controller FC-911.

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10nm Feedback Stage FS-3150X/XY

"Precision positioning device" with high resolution, excellent positioning reproducibility, and strong position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 150mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

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Feedback Stage×シグマ光機 - List of Manufacturers, Suppliers, Companies and Products

Feedback Stage Product List